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UCF/CREOL Leica EBPG5000+ Electron Beam Lithography System
Demo Pictures
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Pictures of devices and structures fabricated by Leica EBPG5000+ E-beam System
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Selection CheckboxTypeNamePicture SizeFile Size
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57nm vias with 100nm period
795 x 62885 KB
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Antenna loop
640 x 480302 KB
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Bolometer_alignment
640 x 480263 KB
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cross_hatched_lines
300 x 30085 KB
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Flower
1600 x 1200817 KB
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Junctions_1
2048 x 1536178 KB
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Sub-50nm junction
1024 x 800802 KB