Logo Home   Documents and Lists   Create   Site Settings   Help    Up to SharePoint Base Site
Icon
UCF/CREOL Leica EBPG5000+ Electron Beam Lithography System
Home
 
Documents
Icon E-beam Documents
Pictures
Icon Demo Pictures
Lists
Icon Contacts
Icon Calendar
Icon Announcements
Icon Links
Discussions
Icon General Discussion
Surveys
Icon
Welcome, to the SharePoint website dedicated to the Leica EBPG5000+ electron beam lithography system at the College of Optics and Photonics.
 
The electron beam lithography system is capable of running at 20, 50 and 100 kV, with a minimum spot size of less than 10nm. The main exposure field size may range between 160um X 160um and 1mm X 1mm with a stitching value of less than 50nm. Electron-beam lithography can be performed on a variety of substrate sizes, including five inch masks, three and four inch wafers, and small pieces. A multi-substrate load lock is used to aid in the sequential processing of multiple jobs. Consistency over long write times is excellent with this system.

Please, refer to the "E-beam Policy and Guidelines" document which can be found under the Documents folder for general information and job submission requirements. For any further e-beam related questions or problems please contact Dr. Ivan Divliansky at: ibd1@creol.ucf.edu
TypeName
Modified By
IconE-beam Policy and Guidelines
Ivan Divliansky
IconUCF E-Beam Fees
Ivan Divliansky
IconDose_Layout Job Submission Form
Ivan Divliansky
IconDirect_Write Job Submission Form
Ivan Divliansky
IconLeica EBPG 5000+ General Documents
Deon Frank
IconStandard Operating Procedures (Univ. of California, Irvine)
Deon Frank
 Add new document
ThumbnailNamePicture Size
Thumbnail Bolometer_alignment640 x 480
Thumbnail cross_hatched_lines300 x 300
Thumbnail Sub-50nm junction1024 x 800
Thumbnail Junctions_12048 x 1536
(More Items...)
 Add picture
 
 
There are currently no active announcements. To add a new announcement, click "Add new announcement" below.
 Add new announcement
  Cornell Nano Fab Facility
  Penn State NanoFab
  Stanford NanoFab
  Resist Processing
 Add new link